A Confocal Measurement Method for Surface Profile Variations and Shell Thickness Uniformity of Hemispherical Shell Resonator

Author:

Liu Yuhan,Zhao Weiqian,Zheng Xin,Wang Yun,Yao Zhuxian,Qiu Lirong

Publisher

Elsevier BV

Reference18 articles.

1. The hemispherical resonator gyro: From wineglass to the planets;David M Rozelle;Proc. 19th AAS/AIAA Space Flight Mechanics Meeting,2009

2. Inertial sensors technologies for navigation applications: State of the art and future trends;El-Sheimy;Satellite Navigation,2020

3. Milli-HRG inertial sensor assembly-a reality;D M Rozelle;IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings. IEEE,2015

4. 422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth;Matthew W Puckett;Nature communications,2021

5. Integrated waveguide coupled Si 3 N 4 resonators in the ultrahigh-Q regime;Daryl T Spencer;Optica,2014

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