Affiliation:
1. Sahand University of Technology, Iran
Abstract
The application of Micro-Electro-Mechanical-Systems (MEMS) in the fields of radio frequency and microwave is offensively spreading. Nowadays a large amount of scientists and research centers worldwide are involved with development, design, and fabrication of MEMS components for RF applications. RF-MEMS show numerous capabilities for improving the performance of RF transceivers. Their excellent features such as extremely low power consumption, low loss, simple and cheap fabrication process, the ability to work at UHF and SHF frequencies, and compatibility with standard CMOS process make them ideal devices replacing the bulky off-chip components and enhancing the performance of on-chip circuits of transceivers. Therefore they can realize the idea of a transceiver on a chip. The aim of this chapter is to provide a reader with deep information in the field of RF-MEMS, covering their current and possible applications, design, modeling, and simulation. Also their problems such as power handling, packaging, frequency extension, et cetera, are discussed. In addition, this chapter will introduce case studies in RF-MEMS area for researchers.
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