ANN Modeling of Motional Resistance for Micro Disk Resonator

Abstract

This article describes how modeling is an integral part of design and development of any system that provides the theoretical characterization of the system and helps in understanding the relations between various parameters of the system, before the system is developed. The capability of an Artificial Neural Network (ANN) to model the complex relations between a set of inputs and outputs is exploited to model the motional resistance and resonance frequency for a contour mode disk resonator. The solution was to develop a multilayer feed forward neural network. The data set required to train the ANN is obtained by developing an electrical equivalent model and through the MEMS simulation software Coventorware. The network is trained using a Levenberg Marquardt algorithm. The number of hidden layers and the number of neurons in each hidden layer is optimized using a genetic algorithm. The ANN model developed an efficient model of the motional resistance and resonance frequency of the disk resonator. The ANN output is compared with the output of an electrical equivalent model and a reported fabricated structure.