Basic Mechanism and Application of Nanoimprint Lithography
-
Published:2016
Issue:570
Volume:49
Page:664-669
-
ISSN:0038-1586
-
Container-title:Journal of the Japan Society for Technology of Plasticity
-
language:en
-
Short-container-title:SOSEI-TO-KAKOU
Publisher
The Japan Society for Technology and Plasticity
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference16 articles.
1. 1） Chou, S., Krauss, P. & Renstrom, P. : Appl. Phys. Lett. 67（1995），3114. 2. 2） Chou, S., Krauss, P. & Renstrom, P. : J. Vac. Sci.Technol., B 14（1996），4129. 3. 3） Colburn, M., Johnson, S., Stewart, M., Damle, S., Bailey, T., Choi, B., Wedlake, M., Michaelson, T., Sreenivasan, S. V., Ekerdt, J., & Willson, C. G. : Proc. of SPIE, 3676（1999），378. 4. 4） Tan, H., Gilbertson, A., & Chou, S. : J. Vac. Sci.Technol., B16（1988），3926. 5. 5） Hirai, Y., Yoshida, S., Okamoto, A., Tanaka, Y., Endo, M., Irie, S., Nakagawa, H. & Sasago, M. : J. Photopolym. Sci. Technol., 14（2001），457.
|
|