Effect of Sputtering Power on in vitro Bioactivity of Zirconia Thin Films Obtained by DC Unbalanced Magnetron Sputtering
Author:
Affiliation:
1. Department of Chemical Engineering, King Mongkut’s University of Technology
2. Department of Physics, Burapha University
3. Thailand Center of Excellence in Physics, Commission on Higher Education, Ministry of Education
Publisher
Society of Chemical Engineers, Japan
Subject
General Chemical Engineering,General Chemistry
Link
https://www.jstage.jst.go.jp/article/jcej/46/1/46_12we088/_pdf
Reference36 articles.
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2. Amaya, C., J. Caicedo, G. Bejarano, C. A. Cortés Escobedo, J. Muñoz-Saldaña, G. Zambrano and P. Prieto; “Influence of Bias Voltage on the Crystallographic Orientation and Morphology of Sputter Deposited Yttria Stabilized Zirconia (YSZ) Thin Films,” Phys. Status Solidi C, 4, 4288–4293 (2007)
3. Amézaga-Madrid, P., W. Antúnez-Flores, I. Monárrez-García, J. González-Hernández, R. Martínez-Sánchez and M. Miki-Yoshida; “Synthesis, Structural Characterization and Optical Properties of Multilayered Yttria-Stabilized ZrO2 Thin Films Obtained by Aerosol Assisted Chemical Vapour Deposition,” Thin Solid Films, 516, 8282–8288 (2008)
4. Balamurugan, A., S. Kannan and S. Rajeswari; “Structural and Electrochemical Behaviour of Sol–Gel Zirconia Films on 316L Stainless-Steel in Simulated Body Fluid Environment,” Mater. Lett., 57, 4202–4205 (2003)
5. Ben Amor, S., B. Rogier, G. Baud, M. Jacquet and M. Nardin; “Characterization of Zirconia Films Deposited by R. F. Magnetron Sputtering,” Mater. Sci. Eng. B, 57, 28–39 (1998)
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