1. Chair for Laser Technology LLT, RWTH Aachen University, Steinbachstr. 15, 52074 Aachen, Germany
2. Fraunhofer Institute for Laser Technology ILT, Steinbachstr. 15, 52074 Aachen, Germany
3. Nonlinear Dynamics of Laser Processing NLD, RWTH Aachen University, Steinbachstr. 15, 52074 Aachen, Germany