Abstract
Abstract
An acoustic sensor packaged with polydimethylsiloxane film sandwich structure is proposed in this paper. The sensor uses a flat glass with a square hole in the middle as the substrate structure. The cavity length of the microfiber knot resonator is significantly changed by the applied acoustic pressure, which is ultimately manifested as a change in the strength of the sensor signal. The sensor has a good response at frequencies from 0.1 to 10 kHz, and has a sensitivity of 0.92 mV Pa−1 at 1 kHz acoustic frequency. The sensor studied in this paper has the advantages of wide frequency band, small size and low cost, and has a good application prospect in the field of acoustic signal detection.
Funder
Research and Development
National Natural Science Foundation of China
Fundamental Research Program of Shanxi Province
the Fund for Shanxi ‘1331 project’ Key Subject Construction and Innovation Special Zone Project.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
10 articles.
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