Method for controlling stress gradients in PVD aluminum nitride
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/28/i=11/a=115009/pdf
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1. Structure and internal stress in ultra-thin silver films deposited on MgF2 and SiO substrates
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3. Sputter deposition of stress-controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
4. Micro-electromechanical film bulk acoustic sensor for plasma and whole blood coagulation monitoring
5. Two-step reactive sputtering of piezoelectric AlN thin films
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