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Large oscillation of electrostatically actuated curved beams

Published:2020-06-22 Issue:9 Volume:30 Page:095005
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Alneamy A M^ORCID,Khater M E,Al-Ghamdi M S^ORCID,Abdel-Aziz A K,Heppler G R,Abdel-Rahman E M^ORCID

Funder

King Fahd University of Petroleum and Minerals

Jazan University

King Abdulaziz City for Science and Technology

CMC Microsystems

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1088/1361-6439/ab94d1/pdf

Reference30 articles.

1. Dynamic pull-in phenomenon in MEMS resonators

2. Snap-Through and Pull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic Loading

3. Investigation on Bistability and Fabrication of Bistable Prestressed Curved Beam

4. The pull-in behavior of electrostatically actuated bistable microstructures

5. The Effects of Initial Rise and Axial Loads on MEMS Arches

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1. A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams;Journal of Microelectromechanical Systems;2024-08

2. Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles;Mathematics;2024-03-25

3. How to Excite Anti-symmetric Modes in a Symmetric MEMS?;NODYCON Conference Proceedings Series;2024

4. Model of a Micromechanical Mode-Localized Accelerometer with an Initially Curved Microbeam as a Sensitive Element;Mechanics of Solids;2023-06

5. Model of a Micromechanical Modal-Localized Accelerometer with a Sensitive Element in the Form of a Beam with an Initial Deflection;Известия Российской академии наук. Механика твердого тела;2023-05-01

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