Monolithic integrated SAW filter based on AlN for high-frequency applications-Reference-Cited by-同舟云学术

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Monolithic integrated SAW filter based on AlN for high-frequency applications

Published:2013-05-16 Issue:6 Volume:28 Page:065013
ISSN:0268-1242
Container-title:Semiconductor Science and Technology
language:
Short-container-title:Semicond. Sci. Technol.

Author:

Kaletta Udo Ch,Santos Paulo V,Wolansky Dirk,Scheit Alexander,Fraschke Mirko,Wipf Christian,Zaumseil Peter,Wenger Christian

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0268-1242/28/i=6/a=065013/pdf

Reference35 articles.

1. SAW ring filters with insertion loss of 1 dB

2. High-frequency surface acoustic wave filter based on diamond thin film

3. ZnO/AlN/diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient

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1. Machine-learned atomic cluster expansion potentials for fast and quantum-accurate thermal simulations of wurtzite AlN;Journal of Applied Physics;2024-02-22

2. Analysis of the Effects of Parameters on the Performance of Resonators Based on a ZnO/SiO2/Diamond Structure;Applied Sciences;2024-01-19

3. Effect of process parameters on co-sputtered Al(1-x)ScxN layer's properties: Morphology, crystal structure, strain, band gap, and piezoelectricity;Materials Science in Semiconductor Processing;2024-01

4. Alloying aluminum nitride with molybdenum could significantly enhance its electromechanical coupling constant;Journal of Alloys and Compounds;2023-12

5. High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation;Semiconductor Science and Technology;2023-11-13

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