A 100μm diameter capacitive pressure sensor with 50 MPa dynamic range
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/26/i=4/a=045009/pdf
Reference36 articles.
1. An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation
2. A silicon directly bonded capacitive absolute pressure sensor
3. Novel MEMS pressure and temperature sensors fabricated on optical fibers
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