Fabrication of a micro patterned parylene-C master by hot-embossing and its application to metallic mold replication-Reference-Cited by-同舟云学术

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Fabrication of a micro patterned parylene-C master by hot-embossing and its application to metallic mold replication

Published:2007-06-15 Issue:7 Volume:17 Page:1402-1413
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Youn Sung-Won,Goto Hiroshi,Takahashi Masaharu,Oyama Shoji,Oshinomi Yasuhiko,Matsutani Kinya,Maeda Ryutaro

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference29 articles.

1. A roller embossing process for rapid fabrication of microlens arrays on glass substrates

2. Two-dimensional polymeric optical waveguides for high-density parallel optical interconnection

3. Nanoimprint lithography

4. Evaluation of Pressure Uniformity Using a Pressure-Sensitive Film and Calculation of Wafer Distortions Caused by Mold Press in Imprint Lithography

5. Replication technology for optical microsystems

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1. Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography;Applied Sciences;2019-07-31

2. Fabrication of perforated polyethylene microfiltration membranes for circulating tumor cells separation by thermal nanoimprint method;Applied Physics A;2019-01

3. Micromachining of Parylene C for bioMEMS;Polymers for Advanced Technologies;2015-12-15

4. Review of polymer MEMS micromachining;Journal of Micromechanics and Microengineering;2015-11-19

5. Fabrication and characterization of the functional parylene-C film with micro/nano hierarchical structures;Microelectronic Engineering;2015-06

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