A surface-micromachined capacitive microphone with improved sensitivity-Reference-Cited by-同舟云学术

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A surface-micromachined capacitive microphone with improved sensitivity

Published:2013-04-09 Issue:5 Volume:23 Page:055018
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Je Chang Han,Lee Jaewoo,Yang Woo Seok,Kim Jongdae,Cho Young-Ho

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/23/i=5/a=055018/pdf

Reference13 articles.

1. Nonlinear effects in MEMS capacitive microphone design

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