Specification of mechanical support structures to prevent SU-8 stiction in high aspect ratio structures-Reference-Cited by-同舟云学术

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Specification of mechanical support structures to prevent SU-8 stiction in high aspect ratio structures

Published:2005-03-23 Issue:5 Volume:15 Page:978-983
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Vora K D,Shew B Y,Harvey E C,Hayes J P,Peele A G

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Stiction in surface micromachining

2. Influence of liquid surface tension on stiction of SOI MEMS

3. Critical Review: Adhesion in surface micromechanical structures

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Collapse of patterns with various geometries during drying in photolithography: numerical study;Journal of Micro/Nanolithography, MEMS, and MOEMS;2012-08-06

2. Fabrication of High Aspect Ratio SU-8 Microstructures on Piezoelectric Transducers;Applied Mechanics and Materials;2011-10-24

3. High-resolution permanent photoresist laminate TMMF for sealed microfluidic structures in biological applications;Journal of Micromechanics and Microengineering;2011-08-04

4. Auxiliary drying to prevent pattern collapse in high aspect ratio nanostructures;Nanotechnology;2011-07-01

5. High Yield Polymer MEMS Process for CMOS/MEMS Integration;MRS Proceedings;2011

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