Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor-Reference-Cited by-同舟云学术

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Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor

Published:2013-11-11 Issue:12 Volume:23 Page:125019
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Hu Zhongxu,Hedley John,Keegan Neil,Spoors Julia,Waugh William,Gallacher Barry,Boillot François-Xavier,Collet Joël,McNeil Calum

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/23/i=12/a=125019/pdf

Reference56 articles.

1. Detection of prostate specific antigen with nanomechanical resonators

2. Quantitative time-resolved measurement of membrane protein–ligand interactions using microcantilever array sensors

3. Quantitative, Label-Free Detection of the Aggregation ofα-Synuclein Using Microcantilever Arrays Operated in a Liquid Environment

4. Zeptogram-Scale Nanomechanical Mass Sensing

5. Development of microcantilever-based biosensor array to detect Angiopoietin-1, a marker of tumor angiogenesis☆

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1. Freestanding Laser-Induced Graphene Ultrasensitive Resonative Viral Sensors;ACS Applied Materials & Interfaces;2022-09-09

2. Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors;Sensors;2022-04-13

3. Fully Differential Actuation and Sensing in Piezoelectric Diaphragm Resonators for High Signal to Background Resonant Sensing;Journal of Microelectromechanical Systems;2020-10

4. Systematic analysis of carbon-based microdisk resonators;FlatChem;2020-03

5. A CMOS-MEMS Thermal-Piezoresistive Oscillator for Mass Sensing Applications;IEEE Transactions on Electron Devices;2020-03

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