Author:
Bring Martin,Sanz-Velasco Anke,R djeg rd Henrik,Enoksson Peter
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
7 articles.
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1. Deep reactive ion etching;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2015
3. Bio-inspired Design of Submerged Hydrogel-Actuated Polymer Microstructures Operating in Response to pH;Advanced Materials;2011-01-25
4. Methods for characterization of wafer-level encapsulation applied on silicon to LTCC anodic bonding;Journal of Micromechanics and Microengineering;2010-06-01
5. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2010