Abstract
Abstract
Thermal budget is a vital element of Si-based superlattice material processing. In this work, a novel n-type ohmic contact scheme with a low thermal budget process is developed by combining high-dose ion implantation and low-temperature alloying techniques. The optimized specific contact resistivity (ρ
c) is reduced to 6.18 × 10−3 Ω cm2 at a low thermal budget of 400 °C, and this is a result of the efficient low-temperature electrical activation of amorphous substances. It is indicated that both the high doping concentration and the formation of a NiSi(Ge) alloy phase contribute to the linear ohmic contact behavior. The ohmic contact resistance dependence on processing temperature is further revealed by a detailed Ni/Si(Ge)alloying model. A minimum ρ
c of 2.51 × 10−4 Ω cm2 is achieved at a thermal budget of 450 °C, which is related to the high bonding intensity at the metal–semiconductor interface. Note that this technique is compatible with standard Si-based CMOS process flows and can be applied in high-performance insulated-gate field-effect transistor (IGFET) fabrication. Furthermore, it is verified that the Si/Ge superlattice structures in our IGFETs can serve as an efficient potential barrier to constrain electrons.
Funder
National Natural Science Foundation of China
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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