Influence of spokes on the ionized metal flux fraction in chromium high power impulse magnetron sputtering
Author:
Funder
Deutsche Forschungsgemeinschaft
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6463/aaac15/pdf
Reference29 articles.
1. Faster-than-Bohm Cross-BElectron Transport in Strongly Pulsed Plasmas
2. Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge
3. High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
4. Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
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