Sub-10-nm-thick SiN nanopore membranes fabricated using the SiO2 sacrificial layer process
Author:
Funder
Hitachi
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Link
https://iopscience.iop.org/article/10.1088/1361-6528/ac10e3/pdf
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