Abstract
Abstract
The local structural properties of representative amorphous oxides, ZnO, HfO2, ZrO2, and In2Ga2ZnO7 were investigated by using X-ray absorption spectroscopy and an ab-initio theoretical calculation (FEFF). The X-ray absorption near-edge structures of the amorphous systems were compared with those of their crystalline counterparts, and were interpreted in terms of weakened structural orders (in the case of ZnO, HfO2, and In2Ga2ZnO7) or fundamentally different local structures (ZrO2; monoclinic-like local structure favoured in amorphous phase in contrast to the tetragonal structure in crystalline film).