Author:
Il’in O I,Il’ina M V,Rudyk N N,Guryanov A V,Fedotov A A
Abstract
Abstract
Experimental studies of the processes of formation of catalytic centres (CC) and carbon nanotubes (CNTs) at ITO contacts have been carried out. The regularities of the influence of the annealing temperature on the geometric dimensions of CC have been established. An array of interwoven CNTs with a highly developed surface has been grown. A model of a gas sensor with a sensitive element based on a CNT network has been created. The reaction time and reaction of the sensor, its sensitivity to N2, O2, and Ar have been experimentally investigated. It has been shown that the sensor has a maximum sensitivity of 17.2% to N2, 16.3% to Ar, and 18.7% to O2 in the range of gas concentrations from 30 to 70 ppm. It has been shown that gas detection is possible at room temperature, despite a rather long reaction and reduction time. In this case, an almost complete restoration of the sensitive element of the initial resistance has occurred without additional heating.