Effect of thickness and type of substrate on optical properties of chromium oxide thin film prepared by sputtering magnetron

Abstract

Abstract The study here submits the impact of the thin-film thickness of chromium on its optical characteristics. All the films of chromium oxide were deposited on quartz and glass substrates via sputtering magnetron. The optical characteristics for a thin film was established out of measurements of transmitting. The spectrum of absorbance and transmittance have been recorded as a function of wavelength between (300-1100 nm) in order to study the Energy gap of permitted direct transition, extinction coefficient and refractive index. The improvement of the crystallization of the coatings / thin film has been discussed depending on substrate which are glass and quartz temperature. Under the experimental conditions; for temperature about (20-150) °C, the films consist of clear well-crystallized (Cr2O3).