Actuator Based on a Dielectric Elastomer with Quartz as a Filler for Vacuum Technology

Abstract

Abstract Modern equipment requires precise movement of objects both at atmospheric pressure and in vacuum conditions. Moreover, vacuum equipment is subjected to a number of external disturbances that adversely affect the manufacturing process and have a direct impact on the quality of manufactured products. A promising development in this area is actuators based on dielectric elastomers, characterized by a short reaction time (milliseconds) and a simple and cheap implementation. Successful implementation depends on an understanding of its behavior and properties, depending on the choice of matrix and filler materials. Most often, expensive barium titanate is used as a filler. This paper discusses the use of quartz as a cheaper filler.