Development of a calculation method of the main parameters of the multistage turbomolecular pump-Reference-Cited by-同舟云学术

Development of a calculation method of the main parameters of the multistage turbomolecular pump

Published:2020-04-01 Issue:1 Volume:781 Page:012010
ISSN:1757-8981
Container-title:IOP Conference Series: Materials Science and Engineering
language:
Short-container-title:IOP Conf. Ser.: Mater. Sci. Eng.

Author:

Gordeeva U S,Demikhov K E,Ochkov A A

Abstract

Abstract We developed a calculation method of the pumping parameters of the molecular stage of the turbomolecular vacuum pump (TMP) operating in the molecular flow region. Also, the authors developed the calculation method of the main parameters of the multistage TMP for the providing the main pumping parameters including ultimate pressure, pumping speed, compression ratio. As a result of calculation, the we got the performance curve of the multistage TMP.

Publisher

IOP Publishing

Subject

General Medicine

Link

https://iopscience.iop.org/article/10.1088/1757-899X/781/1/012010/pdf

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