Development of novel single-source precursor of tin for deposition of tin oxide thin films for various applications

Abstract

Abstract Novel single-source organometallic precursor, Triethanolamine Tin (II) (Sn-TEA), was synthesized by the reaction of SnCl2 and triethanolamine in the presence of Sodium acetate. TGA, FTIR, 1H characterize the Sn-TEA precursor, and 13C NMR was done to confirm its thermal stability and predict its molecular structure. The 1H and 13C NMR showed an organometallic molecule as TEA and acetate form a coordination sphere around the Sn atom in a stable structure. The TGA showed two thermal decomposition steps at ~206.14oC and ~750oC and residue at 800 °C. The precursor was pyrolyzed at 400oC, and the residual powder was characterized by FTIR, which indicated the formation of Tin Oxide. The precursr was then used to deposit SnO2 films by microwave-assisted solvothermal process on glass substrates. The films were characterized with XRD, FESEM and tested for conductivity. XRD confirmed the formation of SnO2 of the cubic lattice. The precursor concentration and microwave irradiation time on the film morphology, compositional analysis, and electrical conductivity were studied thoroughly. Sn-TEA complex proved to be a potential single-source precursor for SnO2 production, and it can be applied to develop highly pure/doped SnO2 films for gas sensing applications in a cost-effective manner