High-rate and wide-area deposition of epitaxial Si films by mesoplasma chemical vapor deposition
Author:
Publisher
Informa UK Limited
Subject
General Materials Science
Link
http://www.tandfonline.com/doi/pdf/10.1088/1468-6996/15/3/035001
Reference15 articles.
1. Crystalline silicon thin-film solar cells—recent results at Fraunhofer ISE
2. Epitaxial thin-film Si solar cells
3. Thin-film monocrystalline-silicon solar cells made by a seed layer approach on glass-ceramic substrates
4. Chemical process of silicon epitaxial growth in a SiHCl3–H2 system
5. Superhigh-Rate Epitaxial Silicon Thick Film Deposition from Trichlorosilane by Mesoplasma Chemical Vapor Deposition
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