MEMS-in-TEM for Nano Tribology-Reference-Cited by-同舟云学术

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MEMS-in-TEM for Nano Tribology

Published:2010-11-01 Issue: Volume:258 Page:012004
ISSN:1742-6596
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Fujita Hiroyuki,Ishida Tadashi,Sato Takaaki,Nabeya Shinsuke

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

http://stacks.iop.org/1742-6596/258/i=1/a=012004/pdf

Reference9 articles.

1. Micromachines as Tools for Nanotechnology

2. Design and fabrication of MEMS-controlled probes for studying the nano-interface underin situTEM observation

3. TEM Sample Preparation and FIB-Induced Damage

4. HRTEM Observation and Current Measurement of the Approach-Contact-Deformation-Fracture Process at MEMS Nano Contact between MEMS Opposing Tips

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Perspective of Micro-Nano Science and Technology;Journal of the Society of Mechanical Engineers;2013

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