Automated software and hardware complex based on an eddy current sensor for studying the properties of thin films

Abstract

Abstract The variety of existing thin-film structures used in modern science and technology is described. The design of a miniature eddy current transducer was developed and improved. Methods for determining the properties of films were presented. The main design parameters of the developed transducer are described and a scheme of operation complex is presented. The results of scanning electrically homogeneous and inhomogeneous films are presented. It was possible to establish the degree of uniformity of the conductivity of the film by constructing histograms that display the number of points with different electrical conductivity.