Mobility of positive ions in CF4
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/514/i=1/a=012059/pdf
Reference19 articles.
1. Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
2. Chemistry of CFn+ (n = 1-3) ions with halocarbons
3. Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors
4. Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/CF4 discharge: Effect of gas composition
5. Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions
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2. Transport coefficients for He+ ions in mixtures He/CF4: modeling laboratory and astrophysical plasmas;Contributions of the Astronomical Observatory Skalnaté Pleso;2022-12-01
3. Comprehensive ion-molecule reactive collision model for processing plasmas;Journal of Vacuum Science & Technology A;2022-12
4. Experimental ion mobility measurements in Ne-CF4;Journal of Instrumentation;2019-04-30
5. A set of cross sections and transport coefficients for CF3 + ions in CF4;Plasma Sources Science and Technology;2019-04-09
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