Micro-catalytic gas sensor operating modes for extended life service, increasing sensitivity to target gases and power consumption reduction

Abstract

Abstract Catalytic gas sensors are among of the most old and widespread gas sensors for combustible gas concentration measurements. However, power consumption these sensors provide is relativity high for modern electronic applications. In this paper research results of combination a silicon MEMS fabrication with operating modes for extended life service, increasing sensitivity to target gases and power consumption reduction are presented. The described solutions allow achieving long-term stability of the sensor in difficult operating conditions - the main requirement for industrial applications, where the continuity of the process is of high value expressed in tangible assets and human lives.