Property of plasma by radio frequency discharge with the use of multi hollow cathodes
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference8 articles.
1. Experimental Study on Favorable Properties of Compound RF Discharge Plasmas with a Tapered Shape Hollow Cathode Compared with a Plane Cathode
2. Transitions of macroscopic structures and self-induced chaos observed in plasmas by a dc hollow cathode discharge having features of nonlinear open systems
3. RF Hollow Cathode Discharges with Tapered Shape
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3. Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode;The European Physical Journal Applied Physics;2019-01
4. Influence of a phase-locked RF substrate bias on the E- to H-mode transition in an inductively coupled plasma;Plasma Sources Science and Technology;2015-07-14
5. Effect of structured electrodes on heating and plasma uniformity in capacitive discharges;Journal of Physics D: Applied Physics;2013-11-26
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