Research on the minimum detection limit for measuring high-purity gases by gas chromatography

Abstract

Abstract At present, the application fields of high-purity gases (purity reached 99.999% and above) include the semiconductor manufacturing industry, chemical analysis, fuel cells, aerospace, medicine, etc., and the quality and purity requirements of high-purity gases are also getting higher and higher. As the only detector that can detect ppb-level trace impurities, the pulsed discharge helium ionization detector (PDHID) is the most used detector in the field of high-purity gases. The minimum detection limit of existing PDHID-related analysis methods is usually calculated theoretically. In order to verify the actual minimum detection limit of PDHID, a multi-group gas distribution system was used in this paper to dilute the permanent gas components in the high-purity gas, and the gas chromatograph with pulsed discharge helium ionization detector (GC-PDHID) was used to detect the obtained different concentrations of standard gases. The experimental results showed that PDHID possessed high sensitivity, good linearity, and a wide linear range. The actual minimum detection limit for the permanent gas components in the high-purity gas could reach the ng/g (ppb) level, which could realize the detection of ultra-low concentration samples, and further verify the actual minimum detection limit of PDHID. This experiment provides a reference basis for the analysis of trace gases in the gas industry, especially in industries such as high-purity and ultra-high-purity gases and gas for the electronics industry, and is of great significance in actual production work.