Optimization Analysis of Vibration Characteristics for Precision Positioning Stage

Abstract

Abstract As the core of semiconductor equipment, the vibration of precision positioning stage has great influence on its comprehensive performance. The research object of this paper is a high-precision positioning stage for chip detection. The precision positioning stage is driven by linear motors and supported by rolling linear guides. During the movement, vibration will be generated due to the influence of cable disturbance force and motor thrust harmonics. Based on Newton mechanics, the dynamic formula group of the motion table is established, and the reasons for the vibration of each degree are analyzed. Based on the geometric nonlinear theory, the cable model is established with the help of finite element software, and the influence of installation dimensions on the dynamic change of the cable assembly is analyzed. The motor thrust formula is established based on the equivalent magnetizing current method, the characteristics and influencing factors of the thrust harmonics are analyzed, and the method to suppress the thrust harmonics from the source is sought. In this paper, the vibration source characteristics of the stage are obtained through theory and simulation, which lays a foundation for the subsequent use of control strategy compensation.