Stress isolations for resonant pressure micro sensors

Abstract

Abstract This paper presents stress isolations for resonant pressure micro sensors that are supported by fixed isolation layers during assembly. While the resonant frequencies of the two resonators experience shifts due to measured pressures, they are susceptible to environmental perturbations. The proposed stress-isolated assembly in this study effectively mitigates the adverse effects of environmental noise and stabilizes the intrinsic frequencies of the resonators. Specifically, when subjected to temperature variations within the range of -55∼85 °C, the accuracy of the stress-isolated resonant pressure microsensor was determined to be ±0.01% FS. Similarly, during 3-axis random vibration tests, the accuracy of these stress-isolated resonant pressure microsensors was quantified as ±0.01% FS in response to environmental vibrations.