Impulse Plasma In Surface Engineering - a review
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/564/i=1/a=012007/pdf
Reference23 articles.
1. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
2. Revised structure zone model for thin film physical structure
3. A structure zone diagram including plasma-based deposition and ion etching
4. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
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