Creation and utilization of straightness standard due to reciprocal measurement of linear stage

Abstract

Abstract In general, profile measuring machine consists of a displacement sensor and movable mechanism. However, as the movable mechanism has profile errors, the output of displacement sensor includes the profile error of the movable mechanism. Therefore, it is necessary to distinguish the profile error of the movable mechanism from the output of the displacement sensor. So we propose a new way to distinguish the profile of object from movable profiles. The new method requires two linear stages and the displacement sensor. Two stages can move and locate independently, and displacements are measured at every location. The profile of object is calculated from the output of displacement sensor. Finally, the pre-known profile was measured by the proposed method, and the result is compared with the pre-known profile.