Gas-discharge plasma diagnostics by a continuous spectrum of optical radiation

Abstract

Abstract In the present work, plasma diagnostics method based on the measurement and theoretical analysis of continuous emission spectrum of a gas discharge was discussed. Using the method, electron temperatures of a DC glow discharge and ferromagnetic enhanced inductive discharge were determined for inert gases in the gas pressure range of 20–200 Pa. Experimental results were compared with the results of numerical calculations for the ferromagnetic enhanced inductive discharge and DC glow discharge. A satisfactory agreement between the optically measured and numerically calculated values of electron temperature was shown.