Improving the mechanical resistance of the glass surface for optoelectronic devices by electron beam processing

Abstract

Abstract The paper considers the issues of hardening the surface of phosphate glasses for optoelectronic devices. The effect of electron-beam processing on the physical-mechanical properties of the glass surface is investigated. It was found that the processing of phosphate glass “SZS23” increases the surface microhardness by 24% owing to removing the damaged layer and changing the elemental composition of the glass surface.