Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis

Author:

Zhu Ziyi,Zhang Shougang,Ruan Jun

Abstract

Abstract Traditional sensors, such as pressure, piezoelectric or piezoresistive, mostly use square silicon-based materials as chassis and use Wheatstone bridge circuits to measure pressure and resistance values. Nowadays, reducing the size of sensors is also a problem to be solved in the increasingly wide range of sensor applications. In this paper, a circular monocrystalline silicon base pressure sensor is designed and its performance is studied. We applied COMSOL software to model the circular chassis base pressure sensor, tested the deformation of the circular chassis base pressure sensor under different access volttimes and pressures, analyzed its sensitivity and other performance, and compared the above performance with the rectangular monocrystalline silicon chassis base pressure sensor. The experimental results show that the circular monocrystalline silicon chassis pressure sensor has excellent electrostriction performance, and the variation of the potential and potential difference in the measuring area is more obvious than that of the rectangular monocrystalline silicon chassis pressure sensor. This paper provides a reference for sensor makers.

Publisher

IOP Publishing

Reference18 articles.

1. Nonlinear error correction method for diffuse silicon piezoresistive pressure sensors;Yang;Journal of Harbin Engineering niversity,2023

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3