Laser Induced Backside Wet Etching: Mechanisms and Fabrication of Micro-Optical Elements
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/59/i=1/a=113/pdf
Reference34 articles.
1. Microoptics
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4. Fabrication of submicron gratings in fused silica by F 2 -laser ablation
5. High-resolution F 2 -laser machining of micro-optic components
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3. Sound-Based Depth Estimation of Glass Microchannel in Laser-Induced Backside Wet Etching Using Wavelet Transform;International Journal of Precision Engineering and Manufacturing-Green Technology;2024-02-08
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