Modeling and simulation of Capacitive Micromachined Ultrasonic Transducer (CMUT)
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/34/i=1/a=098/pdf
Reference5 articles.
1. Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?
2. Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays
3. Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates
4. Full-Lagrangian Schemes for Dynamic Analysis of Electrostatic MEMS
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1. Performance analysis of FEM simulated different shaped membranes based capacitive MEMS sensor;Microsystem Technologies;2024-08-24
2. An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent;Microsystem Technologies;2023-10-11
3. Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography;Microsystems & Nanoengineering;2023-04-10
4. Design of CMUT Cells for High-intensity Focused Ultrasound Applications;2022 IEEE International Conference of Electron Devices Society Kolkata Chapter (EDKCON);2022-11-26
5. Design and analysis of CMUT device using COMSOL for Radio frequency applications;Materials Today: Proceedings;2022
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