Influence of radiative heat transfer on the sublimation of a single chromium (III) β-diketonate particle in the superheated mixture of vapor-inert gas

Abstract

Abstract The paper presents the results of numerical simulation of nonstationary sublimation of spherical particles of Cr(acac)3, floating in the volume of a binary mixture (argonsuperheated vapor of precursor) in a reactor with hot walls. The influence of the vapor content, reactor wall temperature and radiative heat transfer on the kinetics of sublimation/desublimation are analyzed. The characteristic times of induction and total sublimation, as well as the intensity of mass entrainment from the surface of particles of different sizes are determined. The influence of radiation from the hot walls of the sublimator on these parameters is determined.