Formation of out-of-plane film micro arch by methods of technological control of internal stress

Abstract

Abstract In this work is presented the analysis of the manufacturing technology of arcuate elastic elements. In the course of the work, the technological problems of the formation of out-of-plane microelectromechanical structures with the use of surface micromachining were studied. Internal stresses were controlled by varying the pressure of the working gas during sputtering. The use of this method allowed forming the arcuate profile of the Cr-Cu-Cr film structure.