Diagnostics in helicon plasmas for deposition
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference40 articles.
1. Plasma production using a standing helicon wave
2. Fast anisotropic etching of silicon in an inductively coupled plasma reactor
3. The application of the helicon source to plasma processing
4. An experimental study of breakdown in a pulsed Helicon plasma
5. Plasma ionization by helicon waves
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