On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study
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Published:2001-01-17
Issue:1
Volume:10
Page:76-81
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Subject
Condensed Matter Physics
Cited by
167 articles.
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