Resemblance in gas composition of Ar–N2–O2plasmas and Ar–NO plasmas

Author:

van Helden J H,Zijlmans R A B,Schram D C,Engeln R

Publisher

IOP Publishing

Subject

Condensed Matter Physics

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3. Kinetic studies of NO formation in pulsed air-like low-pressure dc plasmas;Plasma Sources Science and Technology;2016-03-30

4. Adsorption and reactivity of nitrogen atoms on silica surface under plasma exposure;Journal of Physics D: Applied Physics;2014-11-07

5. Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-01

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