Controlled generation of pulse-modulated RF plasmas for materials processing
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference22 articles.
1. THE INDUCTIVELY COUPLED RADIO FREQUENCY PLASMA
2. Effects of plasma diameter and operating frequency on dynamic behaviour of induction thermal plasma
3. Generation of pulse-modulated induction thermal plasma at atmospheric pressure
4. Analyte excitation in the inductively coupled plasma studied by power modulation
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4. Gas breakdown mechanism in pulse-modulated asymmetric ratio frequency dielectric barrier discharges;Physics of Plasmas;2014-08
5. Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates;The European Physical Journal D;2014-03
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