Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/22/i=6/a=065009/pdf
Reference74 articles.
1. Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring
2. Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms
3. Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms
4. Principles of Plasma Discharges and Materials Processing
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