Measurement of the magnetic field change in a pulsed high current magnetron discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference15 articles.
1. Magnetron sputter deposition with high levels of metal ionization
2. Ionization of sputtered material in a planar magnetron discharge
3. Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge
4. A novel pulsed magnetron sputter technique utilizing very high target power densities
5. Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge
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