Visible photoluminescence from plasma-polymerized-organosilicone thin films deposited from HMDSO/O2induced remote plasma: effect of oxygen fraction
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/41/i=17/a=175206/pdf
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3. Studies of radiofrequency plasma deposition of hexamethyldisiloxane films and their thermal stability and corrosion resistance behavior;Vacuum;2010-06
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